Libra 536

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Overview

The Libra 536 is a global-shutter camera designed for high-speed, high-resolution imaging applications, offering broad spectral coverage from visible to near-infrared (NIR). Equipped with a global-shutter sensor and a high-bandwidth 10 GigE interface, the camera delivers 8.1-megapixel full-resolution imaging at up to 152 fps, making it an excellent fit for semiconductor manufacturing workflows such as wafer inspection and advanced packaging.

Visible to NIR Imaging

The Libra 536 supports wide-spectrum imaging from 400–1100 nm, achieving 72% QE at 470 nm. Its strong visible-light performance enables accurate detection of surface defects such as scratches or contamination on chip packages, while its NIR capability allows penetration through transparent substrates to reveal internal structural defects—providing greater inspection coverage across multiple manufacturing steps.
Global Shutter

Built on a true global-shutter architecture, the Libra 536 captures high-speed motion without distortion or rolling-shutter artifacts. With 8.1 MP resolution and up to 152 fps, it ensures reliable defect detection by preventing image skew or blur that could lead to false positives or missed defects. This makes the camera ideal for fast, large-area scanning tasks commonly found in semiconductor production.
10 GigE & Trigger

The 10 GigE interface provides stable, lossless transmission of high-resolution data, supporting multi-camera systems and long-distance deployment. An external trigger input enables precise synchronization with semiconductor inspection equipment, ensuring accurate “motion-to-exposure” timing. This is especially beneficial for step-scan workflows and continuous-transport production lines, allowing flexible system integration and stable high-throughput operation.

Specification >

Model: Libra 536
Sensor Type: CMOS
Sensor Model: SONY IMX536
Spectrum: 400nm -1100 nm
Chrome: Mono
Peak QE: 72% @ 470 nm
Array Diagonal: 11 mm (2/3'')
Effective area: 7.8 mm x 7.8 mm
Resolution: 2856 (H) x 2848 (V)
Pixel Size: 2.74 µm x 2.74 µm
Gain Mode: Supports analog gain (1 ~15.7) and digital gain (15.8 ~ 126)
Frame Rate: 152 fps @ 8 bit, 100 fps @ 10 bit, 100 fps @ 12 bit
Full Well Capacity: 10 bit: 9000 e- @ gain 1, 580 e- @ gain 15.7; 12 bit: 9250 e- @ gain 1, 555 e- @ gain 15.7
Readout Noise: 10 bit: 3.8 e- (RMS) @ gain 1, 2.0 e- (RMS) @ gain 15.7; 12 bit: 2.3 e- (RMS) @ gain 1, 1.4 e- (RMS) @ gain 15.7
Dynamic Range: 10 bit: 65 dB @ gain 1, 49.1 dB @ gain 15.7； 12 bit: 72 dB @ gain 1, 52 dB @ gain 15.7
Shutter Mode: Global Shutter
Exposure Time: 8 bit: 2 μs ~ 10 s；10/12 bit: 3 μs ~ 10 s
DSNU: 0.38 e-
PRNU: 0.52%
Image correction: DPC
ROI: Support
Binning : Bin1×2, Bin2×1, Bin2×2
Timestamp Accuracy: 1 μs
Trigger Mode: Hardware, Software
Output Trigger Signals: Readout, Exposure Out , Trigger Ready, Low, High
Trigger Interface: Hirose-12-Pin
Data Interface: 10 GigE
Bit Depth: 8 bit, 10 bit, 12 bit
Optical Interface: C-Mount
Power: 12-24 V, PoE support
Power Consumption: ≤ 12W
Dimensions: 45 mm x 45 mm x 74.3 mm
Software: SamplePro
SDK: C / C++ / C# / Python
Operating System: Windows / Linux
Operating Environment: Working: Temperature 0~40 °C, Humidity 10~85 %;

Storage: Temperature -10~60 °C, Humidity 0~85 %