Libra UV

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Overview

The Libra UV is Tucsen’s UV-sensitive global shutter CMOS camera designed for high-speed, high-resolution inspection in the semiconductor industry. It has been successfully integrated into various production stages, including front-end wafer inspection and back-end packaging defect detection. Beyond semiconductor applications, its superior ultraviolet response also makes it an excellent choice for bio-spectral instrumentation, medical diagnostics, and precision electronics inspection.

Wide Spectrum / UV-Enhanced Sensitivity

Covering a broad spectral range from 200 nm to 1000 nm, the Libra UV delivers exceptional sensitivity in the UV region (200–400 nm) with up to 48% quantum efficiency at 365 nm. This makes it ideal for large-area wafer inspection and rapid micron-level defect screening in semiconductor packaging and testing processes.
Global Shutter for High-Speed Imaging

Equipped with global shutter technology, the Libra UV captures fast-moving samples without motion artifacts. Its 10G GigE interface supports high-speed data transmission, achieving up to 100 fps @ 12 bit and 152 fps @ 8 bit at full 8.1 MP resolution—providing a remarkable advantage in throughput and precision.
Compact Design

Tailored for equipment and system integration, the Libra UV achieves an optimal balance between high-quality imaging performance and compact mechanical design, making it highly adaptable for advanced inspection instruments and embedded optical systems.

Specification >

Model: Libra UV
Sensor Type: CMOS
Sensor Model: SONY IMX487
Spectrum: 200nm -1000 nm
Chrome: Mono
Peak QE: 56% @ 500 nm, 48% @ 365 nm
Array Diagonal: 11 mm (2/3'')
Effective area: 7.8 mm x 7.8 mm
Resolution: 2856 (H) x 2848 (V)
Pixel Size: 2.74 µm x 2.74 µm
Gain Mode: Supports analog gain (1 ~15.7) and digital gain (15.8 ~ 126)
Frame Rate: 152 fps @ 8 bit, 100 fps @ 10 bit, 100 fps @ 12 bit
Full Well Capacity: 10 bit：9000 e- @ gain 1, 580 e- @ gain 15.7 ;12 bit：9250 e- @ gain 1, 555 e- @ gain 15.7
Readout Noise: 10 bit：3.9 e- (RMS) @ gain 1, 2.1 e- (RMS) @ gain 15.7; 12 bit：2.4 e- (RMS) @ gain 1, 1.5 e- (RMS) @ gain 15.7
Dynamic Range: 10 bit：65 dB @ gain 1, 49.1 dB @ gain 15.7 ; 12 bit：72 dB @ gain 1, 52 dB @ gain 15.7
Shutter Mode: Global Shutter
Exposure Time: 8 bit：2 μs – 10 s; 10/12 bit：3 μs – 10 s
DSNU: 0.38 e-
PRNU: 0.52%
Image correction: DPC
ROI: Support
Binning : Bin 1 x 2 (Avg and Sum), Bin 2 x 1 (Avg and Sum), Bin 2 x 2 (Sum)
Timestamp Accuracy: 1 μs
Trigger Mode: Hardware, Software
Output Trigger Signals: High, Low, Trigger Ready, Readout, Exposure Out
Trigger Interface: Hirose-12-Pin
Data Interface: 10 GigE
Bit Depth: 8 bit, 10 bit, 12 bit
Optical Interface: C-Mount
Power: 12 V / 2 A, PoE support
Power Consumption: ≤ 12W
Dimensions: 45 mm x 45 mm x 74.3 mm
Software: SamplePro
SDK: C / C++ / C# / Python
Operating System: Windows / OpenEuler
Operating Environment: Working: Temperature 0~40 °C, Humidity 10~85 %;

Storage: Temperature -10~60 °C, Humidity 0~85 %