Libra UV - Global Shutter Mono CMOS Camera for Semiconductor Inspection

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Overview

The Libra UV is Tucsen’s UV-sensitive global shutter CMOS camera designed for high-speed, high-resolution inspection in the semiconductor industry. It has been successfully integrated into various production stages, including front-end wafer inspection and back-end packaging defect detection. Beyond semiconductor applications, its superior ultraviolet response also makes it an excellent choice for bio-spectral instrumentation, medical diagnostics, and precision electronics inspection.

Wide Spectrum / UV-Enhanced Sensitivity

Covering a broad spectral range from 200 nm to 1000 nm, the Libra UV delivers exceptional sensitivity in the UV region (200–400 nm) with up to 48% quantum efficiency at 365 nm. This makes it ideal for large-area wafer inspection and rapid micron-level defect screening in semiconductor packaging and testing processes.
Global Shutter for High-Speed Imaging

Equipped with global shutter technology, the Libra UV captures fast-moving samples without motion artifacts. Its 10G GigE interface supports high-speed data transmission, achieving up to 100 fps @ 12 bit and 152 fps @ 8 bit at full 8.1 MP resolution—providing a remarkable advantage in throughput and precision.
Compact Design

Tailored for equipment and system integration, the Libra UV achieves an optimal balance between high-quality imaging performance and compact mechanical design, making it highly adaptable for advanced inspection instruments and embedded optical systems.

Specification >

Product Name / Model : Libra UV
Sensor Type: CMOS
Spectrum: 200nm -1000 nm
Chrome: Mono
Peak QE: 56% @ 500 nm, 48% @ 365 nm
Array Diagonal: 11 mm (2/3'')
Effective area: 7.8 mm x 7.8 mm
Resolution: 2856 (H) x 2848 (V)
Pixel Size: 2.74 µm x 2.74 µm
Frame Rate: 152 fps @ 8 bit, 100 fps @ 10 bit, 100 fps @ 12 bit
Full Well Capacity: 10 bit：9000 e- @ gain 1, 580 e- @ gain 15.7 ;12 bit：9250 e- @ gain 1, 555 e- @ gain 15.7
Readout Noise: 10 bit：3.9 e- (RMS) @ gain 1, 2.1 e- (RMS) @ gain 15.7; 12 bit：2.4 e- (RMS) @ gain 1, 1.5 e- (RMS) @ gain 15.7
Dynamic Range: 10 bit：65 dB @ gain 1, 49.1 dB @ gain 15.7 ; 12 bit：72 dB @ gain 1, 52 dB @ gain 15.7
Shutter Mode: Global Shutter
ROI: Support
Trigger Mode: Hardware, Software
Data Interface: 10 GigE
Bit Depth: 8 bit, 10 bit, 12 bit
Optical Interface: C-Mount
Power: 12 V / 2 A, PoE support
Power Consumption: ≤ 12W
Remark: For further technical parameters, please download the product specification sheet for details.